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Process sequence illustration. 1) Steps 1-4 of process, forming the SiN
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![Schematic drawing showing the dimensions of the Si chip used in this](https://i2.wp.com/www.researchgate.net/publication/226320104/figure/fig1/AS:669093661245455@1536535768902/Schematic-drawing-showing-the-dimensions-of-the-Si-chip-used-in-this-study-Also-shown.png)
Schematic drawing showing the dimensions of the Si chip used in this